Common-path depth-filtered digital holography for high resolution imaging of buried semiconductor structures

Markus Finkeldey, Falk Schellenberg, Nils C. Gerhardt, Chris­tof Paar, Martin R. Hofmann

Proc. SPIE 9771, Practical Holography XXX: Materials and Applications, 97710G (7 March 2016); doi: 10.1117/12.2212454

[DOI]

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